Silicon VLSI Technology: Fundamentals, Practice and Modeling

Silicon VLSI Technology: Fundamentals, Practice and Modeling

<P> <B> </B> Unique in approach, this book provides an <I>integrated</I> view of silicon technology--with an emphasis on modern computer <I>simulation.</I> It describes not only the manufacturing practice associated with the technologies used in silicon chip fabrication, but also the underlying scientific basis for those technologies. <B> </B> Modern CMOS Technology. Crystal Growth, Wafer Fabrication and Basic Properties of Silicon Wafers. Semiconductor Manufacturing--Clean Rooms, Wafer Cleaning and Gettering. Lithography. Thermal Oxidation and the Si/SiO<V>2 Interface. Dopant Diffusion. Ion Implantation. Thin Film Diffusion. Etching. Backend Technology. <B> </B> For anyone interested in Fabrication Processes. </P>