Microlithography: Science and Technology, Second Edition (Opitcal Science and Engineering)

Microlithography: Science and Technology, Second Edition (Opitcal Science and Engineering)

• Used Book in Good Condition

This new edition of the bestselling <STRONG>Microlithography: Science and Technology</STRONG> provides a balanced treatment of theoretical and operational considerations, from elementary concepts to advanced aspects of modern submicron microlithography. Each chapter reflects the current research and practices from the world's leading academic and industrial laboratories detailed by a stellar panel of international experts.<BR><BR><STRONG>New in the Second Edition<BR></STRONG>In addition to updated information on existing material, this new edition features coverage of technologies developed over the last decade since the first edition appeared, including:<BR> <UL> <LI>Immersion Lithography</LI> <LI>157nm Lithography</LI> <LI>Electron Projection Lithography (EPL)</LI> <LI>Extreme Ultraviolet (EUV) Lithography</LI> <LI>Imprint Lithography</LI> <LI>Photoresists for 193nm and Immersion Lithography</LI> <LI>Scatterometry</LI></UL> <P><STRONG>Microlithography: Science and Technology, Second Edition</STRONG> authoritatively covers the physics, chemistry, optics, metrology tools and techniques, resist processing and materials, and fabrication methods involved in the latest generations of microlithography such as immersion lithography and extreme ultraviolet (EUV) lithography. It also looks ahead to the possible future systems and technologies that will bring the next generations to fruition.<BR><BR>Loaded with illustrations, equations, tables, and time-saving references to the most current literature, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to achieve robust, accurate, and cost-effective microlithography processes and systems.</P>